Apr 01, 2000 · Handbook of Silicon Based MEMS Materials and Technologies. 1st Edition - April 1, 2000. Editors: Markku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka, Veikko Lindroos, Veli-Matti Airaksinen, Sami Franssila, Ari Lehto, Teruaki Motooka. eBook ISBN:. View series: Micro and o Technologies.
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